A DESIGN ANALYSIS OF MICROMIRRORS IN STACKED CONFIGURATIONS WITH MOVING ELECTRODES

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International Journal on Smart Sensing and Intelligent Systems

Subject: Computational Science & Engineering, Engineering, Electrical & Electronic

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VOLUME 1 , ISSUE 2 (June 2008) > List of articles

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A DESIGN ANALYSIS OF MICROMIRRORS IN STACKED CONFIGURATIONS WITH MOVING ELECTRODES

Sangtak Park / So-Ra Chung / John T.W. Yeow

Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 1, Issue 2, Pages 480-497, DOI: https://doi.org/10.21307/ijssis-2017-303

License : (CC BY-NC-ND 4.0)

Published Online: 13-December-2017

ARTICLE

ABSTRACT

Micromirrors fabricated by MEMS technology have demonstrated to be important sensing or actuating components in many industrial and biomedical applications such as laser scanning displays, optical switch matrices, and biomedical imaging systems. In this paper, various actuation mechanisms for micromirrors are described. A new geometric configuration of a stacked micromirror that is actuated by electrostatic force is proposed and analyzed to show its superior performance in terms of deflection angle, actuation voltage, and frequency response.

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REFERENCES

[1] Stephen D. Sentruria, “Microsystem Design”, Kluwer Academic Publishers, 2001
[2] Tze Wei Yeow, K. L. Eddie Law, and Andrew A. Goldenberg. "SOI-Based 2-D MEMS L-Switching Matrix for Optical Networking." IEEE Jounal of Selected Topics in Quantum Electronics, 2003: 603-613.
[3] J. T. W. Yeow, V. X. D. Yang, A. Chahwan, M. L. Gordon, B. Qi, I. A. Vitkin, B. C. Wilson, A. A. Goldenberg. "Micromachined 2-D scanner for 3-D optical coherence tomography." Sensors and Actuators A:Physical, 2005: 331-340.
[4] Takayuki Iseki, Miki Okumura and Takashi Sugawara. "Two-Dimensionally Deflecting Mirror Using Electromagnetic Actuation." Optical Review, 2006: 189-194.
[5] Orphee Cugat, Jerome Delamare, and Gilbert Reyne. "Magnetic Micro-Actuators and Systems (MAGMAS)." IEEE Transactions on Magnetics, 2003: 3607-3612.
[6] M R J Gibbs, E W Hill and P J Wright. "Magnetic materials for MEMS applications." Journal of Physics D:Applied Physics, 2004: R237-R244.
[7] Jonathan J. Bernstein, William P. Taylor, John D. Brazzle, Christopher J. Corcoran, Gregory Kirkos, Jefferson E. Odhner, Ajay Pareek, Marc Waelti, and Marvin Zai. "Electromagnetically Actuated Mirror Arrays for Use in 3-D Optical Switching Applications." Journal of Microelectromechanical Systems, 2004: 526-535.
[8] Robbins, William P. "High-Displacement Piezoelectric Actuator Utilizing a Meander-Line Geometry-Part II:Therory." IEEETransactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1991: 461-467.
[9] Young Ho Seo, Doo-Sun Choi, Joon-Hyung Lee, Taik-Min Lee, Tae-Jin Je and Kyung-Hyun Whang. "Piezoelectric Actuator Based on Stiffness Control and Stroke Amplication for Large Lateral Actuation." IEEE International Conference on Micro Electro Mechanical Systems. 2005. 383-386.
[10] Janak Singh, Terence Gan, Ajay Agarwal, Mohanraj, Saxon Liw. "3D free space thermally actuated micromirror device." Sensors and Actuators A: Physical, 2005: 468-475.
[11] Atre, Amarendra. "Analysis of out-of-plane thermal microactuators." Journal of Micromechanics and Microengineering, 2006: 250-213.
[12] Jeffery F Rhoads, Steven W Shaw, and Kimberly L Turner, “ The nonlinear response of resonant microbeam systems with purely-parametric electrostatic actuation” Journal o f Micromechanics and Microengineering, 2006: 890-899.
[13] Feixia Pan, Joel Kubby, Eric Peeters, Alex T. Tran, Subrata Mukherjee. "Squeeze Film Damping Effect on the Dynamic Response of a MEMS Torsion Mirror." International Conference on Modeling and Simulation of Microsystems. 1998. 474-479.
[14] Giuseppe Barillaro, Antonio Molfese, Andrea Nannini and Francesco Pieri. "Analysis, Simulation and relative performances of two kinds of serpentine springs." Journal of Micromechnics and microengineering (IOP Publishing Ltd), 2005: 736-746.
[15] Jianliang You, Muthukumaran Packirisamy, Ion Stiharu. "Analysis, Simulation and Testing of a Micromirror with Rotational Serpentine Springs." Intelligent Sensing and Information Processing. 2005. 219-225.

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